Table-top EUV continuum light source

Evaluation of lab-scale EUV microscopy using a table-top laser source

Top-up operation at Pohang Light Source-II.

After three years of upgrading work, PLS-II (S. Shin, Commissioning of the PLS-II, JINST, January 2013) is now successfully operating. The top-up operation of the 3 GeV linear accelerator had to be delayed because of some challenges encountered, and PLS-II was run in decay mode at the beginning in March 2012. The main difficulties encountered in the top-up operation of PLS-II are different leve...

Imaging Diagnostics of Debris from Double Pulse Laser-Produced Tin Plasma for EUV Light Source

The dynamics of debris from laser produced Tin (Sn) plasma was investigated for EUV light source. The kinetic behaviors of the Sn atoms and of the dense particles from Sn droplet target irradiated by double pulses from the Nd:YAG laser and the CO2 laser were also investigated by the laser-induced fluorescence imaging method and a high-speed imaging, respectively. After the pre-pulse irradiation...

CO2 Laser Produced Tin Plasma Light Source as the Solution for EUV Lithography

High average power EUV light source has been the “most critical” issue in the research and development of the EUV lithography system in one decade. EUV LLC and International Sematech significantly stimulated the global research community to work seriously to advance plasma technology in achieving the goal of the EUV source, required by the semiconductor industry. It is instructive to look into ...

Table-top Time-reversal Violation

Many electrical and mechanical systems with two normal modes are appropriate for illustrating the quantum mechanics of neutral kaons. The illustration of CPor time-reversal-violation in the neutral kaon system by mechanical or electrical analogues is more subtle. Some possibilities which could be realized in a table-top demonstration are suggested.